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Ortiz, A L.; Sánchez-Bajo, F; Cumbrera, F L.; Guiberteau, F, 2013: The prolific polytypism of silicon carbide Influence of polytypism on therm

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A semiconductor device includes trench gate structures that extend from a first surface into a semiconductor body of silicon carbide. The trench gate

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In a state where a silicon carbide substrate having a first main surface and second main surface opposite to each other is fixed to a base material

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